Swanson Center for Micro and Nano Systems
B63C Benedum Hall
3700 O’Hara Street
Pittsburgh, PA 15261
The School of Engineering in the University of Pittsburgh has recently established the John A. Swanson Micro and Nanotechnology (JASMN) Laboratory located in the 6th floor of the Benedum Engineering Hall. A strong research team is on board with expertise in the areas of microfabrication, smart materials (piezoelectric and electrostrictive materials, magnetostrictive materials and shape memory alloys), functional polymers and devices, micro power generation systems, and MEMS device design and applications.
The facilities of the JASMN Lab are open for the University-wide Microelectromechanical Systems (MEMS) and Nanotechnology research and education activities. The current facilities can be utilized for the fabrication, packaging, and testing of various thin and thick film materials, microsensors and microactuators, and various functional materials based micro- and nano-scale devices and structures. Due to stringent processing requirements, the lab is designed to meet class 1000/10,000 clean room specifications throughout with certain areas and rooms in the lab satisfying class 1000 specifications. Activities that can be performed in the JASMN Laboratory will include: DC and RF magnetron sputtering, photolithography, chemical vapor deposition (CVD), anisotropic and isotropic etching, reactive ion etching (RIE), bulk and surface micromachining, silicon-silicon bonding, electrostatic bonding, wire bonding, dicing, probe inspection, measurement and testing, etc.\